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发明名称
WASHING METHOD
摘要
申请公布号
JPH078925(A)
申请公布日期
1995.01.13
申请号
JP19930172725
申请日期
1993.06.18
申请人
TOKYO ELECTRON LTD
发明人
KOMINO MITSUAKI
分类号
B08B3/04;H01L21/304;(IPC1-7):B08B3/04
主分类号
B08B3/04
代理机构
代理人
主权项
地址
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