Method for detecting a surface deformation by means of interferometry

摘要

Method for detecting a surface deformation by means of interferometry, a time-varying phase relationship between two wave fields which are coherent with respect to each other being determined, at least one of these wave fields, reflected by an object surface (1), imaging the object surface (1), via optics (4), in an image plane and interfering in the image plane with the second wave field which functions as reference wave field. The interference pattern thus produced is picked up by an optoelectronic sensor (5), values for the radiation intensity I being determined for each image point of the sensor (5). From the intensity fluctuations at each individual image point of the sensor (5), the absolute magnitude of the displacement relative to the reference wave field is calculated for the region of the object surface (1) imaged in the image point. During the surface deformation, the result can be displayed on a screen (6). <IMAGE>