Process for producing a layer system having at least one layer of a metal-oxidic superconducting material

摘要

The invention relates to a process for producing a layer system having a layer of a metal-oxidic, superconducting material, in which material of a metal-oxidic superconductor is removed from a target and the layer is formed on a substrate by deposition at a defined temperature above the transition temperature of the metal-oxidic superconductor. It is an object of the invention to provide such a process in which a reproducible process procedure is achieved. For this purpose, after the deposition of the metal-oxidic superconducting material, the layer formed on the substrate is cooled to a defined temperature below the transition temperature of the metal-oxidic superconductor and held for a defined period of time. During this time, the layer formed is exposed to loading with activated oxygen for the first time after the end of the deposition process.