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经营范围
发明名称
Abschlussventil für Einkristallziehapparat.
摘要
申请公布号
DE69014223(D1)
申请公布日期
1995.01.05
申请号
DE1990614223
申请日期
1990.03.22
申请人
SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP
发明人
IWASAKI, ATSUSHI, TAKEFU-SHI, FUKUI-KEN, JP;MIZUISHI, KOJI, ANNAKA-SHI, GUNMA-KEN, JP;ODA, MICHIAKI, ANNAKA-SHI, GUNMA-KEN, JP
分类号
F16K3/18;C30B15/00;H01L21/208;(IPC1-7):C30B15/00
主分类号
F16K3/18
代理机构
代理人
主权项
地址
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