Thermal conductivity measuring device

摘要

The area of a cross-section perpendicular to a flow direction in a flow path for guiding a sample gas to a detector is set to be larger than that of a cross-section perpendicular to the flow direction in a hollow portion of a base under a membrane of the detector so as to set the volume of the flow path near the hollow portion to be larger than that of the hollow portion. One or both of a thermal conductivity of the gas and its change are measured with high sensitivity and high precision.