Process and device for machining workpieces by means of a laser beam

摘要

A process for precision control of a laser beam for machining workpieces while achieving high surface quality. The actual distance between a reference location and the workpiece surface is determined. A setpoint/actual value deviation between a predetermined setpoint distance and the actual distance measured is also determined. Control parameters are determined by a control unit in accordance with the setpoint/actual value deviation. The resulting control parameter outputs are coupled to a laser control unit to control the beam power of the laser. The disclosure also includes the apparatus for accomplishing the process.