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发明名称
THIN FILM MANUFACTURING DEVICE
摘要
申请公布号
JPH06349739(A)
申请公布日期
1994.12.22
申请号
JP19930138042
申请日期
1993.06.10
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
OSHIO SHOZO;MATSUOKA TOMIZO
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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