| 摘要 |
PURPOSE:To enlarge the take in effect of a light by forming a texture structure on the surface of a solar battery by ultrasonic processing thereby increasing the surface area and facilitating the irregular reflection of an incident light further. CONSTITUTION:Through a tool 2, which has a plurality of successive V grooves on its processing face, is attached to an ultrasonic horn 1, the V groove is 140mum in pitch and 400mm<2> in processing are, and ultrasonic vibration of 28KHz is given to the ultrasonic horn 1 and the tool 2 by driving an ultrasonic oscillator 3. And, the tool 2 is pressed against the surface of a silicon solar battery, while supplying slurry including required floating whetstone particles 5 of 2500 class in particle degree between the tool 2 and silicon solar cell 4, so as to form a texture structure 140mum in pitch and 45mum in height on the surface of the silicon solar battery 4. Accordingly, minute irregularity corresponding to the particle degree of stone particles is made, so that surface area increases, an the efficiency of the solar battery can be improved.
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