| 摘要 |
PURPOSE: To prevent the damage of a plate-shaped part by separating the plate- shaped part from a heating plate member in a pref. state by surrounding the contact surface of a carrier plate member by the closed frame-shaped outer edge part having no opening part formed thereto of an air distributing pipeline. CONSTITUTION: Carrier plate members 2, 2' are superposed only at the outer edge parts 4 thereof and depressed parts 5 are slightly depressed from the contact surfaces 3 of both members 2, 2'. Opening parts 10 with which passages for compressed air communicate through gas distributing pipings 11 are provided to the internal surfaces 9 of the carrier plate members 2, 2' in the surfaces on the back side of porous sintered metal insert members 8, 8'. Compressed air is allowed to flow from the opening parts 10 from the right to the left to be introduced into the insert member 8 and allowed to flow in depressed parts 7 and, at the same time, hot air is sucked to be discharged to the opposite side of the carrier plate member 2'. Subsequently, two carrier plate members 2, 2' are separated from each other. |
