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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06338494(A)
申请公布日期
1994.12.06
申请号
JP19930129749
申请日期
1993.05.31
申请人
KAWASAKI STEEL CORP
发明人
SHIDA YOSHIKATSU
分类号
H01L21/31;H01L21/324;H01L29/78;(IPC1-7):H01L21/31;H01L29/784
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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