发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PURPOSE:To improve the element isolation breakdown-strength of an N-channel transistor region. CONSTITUTION:A LOCOS oxide film 2 for isolating an element region from another element region is provided on the main surface of a semiconductor substrate 1. A channel cut layer 7a formed of P-type impurity is provided under the element regions. A P<+>-impurity region 34 higher in concentration than the P-type impurity in the channel cut layer 7a is formed on the main surface of the semiconductor substrate 1 and directly under the bird's beak part of the LOCOS oxide film 2.
申请公布号 JPH06334032(A) 申请公布日期 1994.12.02
申请号 JP19930281450 申请日期 1993.11.10
申请人 MITSUBISHI ELECTRIC CORP 发明人 KOGA TAKESHI
分类号 H01L21/76;H01L21/316;H01L21/762;H01L21/822;H01L21/8238;H01L21/8242;H01L27/04;H01L27/08;H01L27/092;H01L27/108;H01L29/10 主分类号 H01L21/76
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