发明名称 |
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE |
摘要 |
PURPOSE:To improve the element isolation breakdown-strength of an N-channel transistor region. CONSTITUTION:A LOCOS oxide film 2 for isolating an element region from another element region is provided on the main surface of a semiconductor substrate 1. A channel cut layer 7a formed of P-type impurity is provided under the element regions. A P<+>-impurity region 34 higher in concentration than the P-type impurity in the channel cut layer 7a is formed on the main surface of the semiconductor substrate 1 and directly under the bird's beak part of the LOCOS oxide film 2. |
申请公布号 |
JPH06334032(A) |
申请公布日期 |
1994.12.02 |
申请号 |
JP19930281450 |
申请日期 |
1993.11.10 |
申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
KOGA TAKESHI |
分类号 |
H01L21/76;H01L21/316;H01L21/762;H01L21/822;H01L21/8238;H01L21/8242;H01L27/04;H01L27/08;H01L27/092;H01L27/108;H01L29/10 |
主分类号 |
H01L21/76 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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