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发明名称
Verfahren zur Anpassung des Generators bei bipolaren Niederdruck-Glimmprozessen
摘要
申请公布号
DE4324683(C1)
申请公布日期
1994.11.17
申请号
DE19934324683
申请日期
1993.07.22
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80636 MUENCHEN, DE
发明人
KIRCHHOFF, VOLKER, 01324 DRESDEN, DE;SCHILLER, SIEGFRIED, 01324 DRESDEN, DE;RESCHKE, JONATHAN, 01067 DRESDEN, DE;GOEDICKE, KLAUS, 01307 DRESDEN, DE
分类号
H01J37/32;H05H1/46;(IPC1-7):H05H1/46;C23C16/50
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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