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发明名称
Schleudergiessbare Mischungen für die Herstellung von Schichten mit erhöhtem Kontrast im tiefen UV-Licht.
摘要
申请公布号
DE3889392(T2)
申请公布日期
1994.11.17
申请号
DE19883889392T
申请日期
1988.07.29
申请人
MICROSI, INC. (N.D.GES.D.STAATES DELAWARE), PHOENIX, ARIZ., US
发明人
DAVID, GARY CHARLES, ALBANY NEW YORK 12205, US
分类号
G03F7/095;G03F7/09;G03F7/26;G09B9/32;H01F1/153;H01L21/027;H01L21/30;(IPC1-7):G03F7/09
主分类号
G03F7/095
代理机构
代理人
主权项
地址
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