| 摘要 |
<p>PURPOSE:To increase the speed and precision of the positioning of a moving body by a vibration removing mechanism. CONSTITUTION:This positioning control method is provided with the moving body 5 to execute positioning, the vibration removing mechanism on which the moving body 5 is mounted, a position measuring instrument which measures the position of the moving body, a subtracter which calculates the deviation of the moving body position from a target position, a controller 4 which controls the moving body 5 on the basis of the deviation, a disturbance estimation unit 7 which estimates unknown disturbance 6 applied to the moving body 5 in a driving device which drives the moving body 5 on the basis of the output of the controller 4, and a band-pass filter 8 which passes only a certain frequency band centering on the natural vibration frequency of the vibration removing mechanism. Then only a natural vibration frequency component of the vibration removing mechanism is extracted from a disturbance estimated value 7 and subtracted from the output of the controller 4.</p> |
