| 摘要 |
PURPOSE:To greatly increase the speed of analysis of a gas analysis device by causing an ion beam to impinge of the magnetic field of deflection magnets with an uneven distribution of two-dimensional magnetic field intensity, and simultaneously detecting various kinds of ions using a various-ion detector. CONSTITUTION:The distance D between both magnetic pole surfaces 3A, 3B is greatest at a front center portion 3f and is continuously decreased from the front center portion 3f to the traverse portion 3g on each side and toward the center 3h of depth so that the distance D is at its minimum on both sides 31 of depth. An ion beam 2a containing many kinds of ions derived from ionization of a gas for analysis at an ion source 2 is made to impinge on the magnetic field of deflection magnets 3, 3E having an uneven distribution of two-dimensional magnetic field intensity and the ions are implanted, and thereby the ions of great mass charge ratio (M/e) are strongly deflected by the high field portion inside the field distribution which continuously varies in such a way as to describe a sphere with greater strength around its outer periphery, and the various kinds of ions within a detecting range can be detected 4 when ejected 5. |
