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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06310539(A)
申请公布日期
1994.11.04
申请号
JP19930093224
申请日期
1993.04.20
申请人
FUJITSU LTD
发明人
KATAUE TERUHIKO;YOKOYAMA TERUO
分类号
H01L29/812;H01L21/338;(IPC1-7):H01L21/338
主分类号
H01L29/812
代理机构
代理人
主权项
地址
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