METAL DEFUSING SYSTEM FOR OHMIC CONTACT

摘要

The metal diffusion system can obtain better conditioned (regularity, symmetricity) annealing than the conventional soldering and anneal simultaneously a multiple of semicondustors based on the area of a heater. The system comprises an annealing furnace (20); a vacuum pump (30) for evacuating the annealing furnace (20); a temp. control means (40) controlling the temp. of the furnace (20): a halogen lamp (9) generating heat: a heater (6) transferring the heat from the halogen lamp (9); a mica plate (10) making the semiconductor (2) separate from the heater (6).