DEVICE FOR MEASURING TEMPERATURE OF SILICON WAFER,申请号JP19930100254-传众专利搜索

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发明名称	DEVICE FOR MEASURING TEMPERATURE OF SILICON WAFER
摘要
申请公布号	JPH06288837(A)	申请公布日期	1994.10.18
申请号	JP19930100254	申请日期	1993.04.02
申请人	TOKAI CARBON CO LTD	发明人	UEDA RISA
分类号	G01K1/14;H01L21/66;(IPC1-7):G01K1/14	主分类号	G01K1/14
代理机构		代理人
主权项
地址

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