ULTRASONIC VIBRATOR AND ITS MANUFACTURE

摘要

PURPOSE:To increase the performance and remarkably decrease the cost because of high yield by using a manufacturing method as spray and deposition of ultrafine particles when each member of an ultrasonic vibrator is formed. CONSTITUTION:A lower electrode 16 is formed on a lower resonator 25 by spraying and depositing ultrafine particles. In the same way, a piezoelectric thin film 17, an upper electrode 18 and an upper resonator 22 are formed in order on the lower electrode 16.