PROTECTIVE DEVICE FOR LASER PROCESSING ASSEMBLY

摘要

PURPOSE: To provide a device which remove smoke and other secondary products generated by a laser processing device for substrates and protect the processing device. CONSTITUTION: The housing 23 which is mounted on an assembly 21 for condensing the laser beam and surrounds a volumetric space with a machine to be processed is provided with a first opening for the input of the laser beam and a second opening 26 which has an area equal to the scanning range of the laser beam. Further, the housing is provided with a third opening 29 for injecting a compressed gas therethrough and an exhaust port 41 of the gas. The gas introduced through a filling port of housing gas is made to be an air stream from a porous plate 32 and an air inflow port 33 disposed on a bottom part of the housing, and is introduced into the exhaust port. The protection device is provided with a polymer film 42 having low laser beam adsorption just below the first opening and, thereby, lenses and the like are protected from the scattering of the secondary products. Gas velocity is less than 3 m/see and a further effect is obtained by connecting a vacuum device with the exhaust port.