DRYER OF SUBSTRATE AFTER WASHING

摘要

PURPOSE:To reduce running cost, to eliminate the need for the installation of steaming facilities and to avoid the complication of device constitution and the increase of cost by improving thermal efficiency as the whole device in a device, in which a substrate is heated by steam at the time of the drying a substrate after washing. CONSTITUTION:A heat exchange type feedwater heater 58 is interposed in a pure-water feed passage 56 connecting a pure-water supply source and a steam generator 30, and a steam exhaust passage 34 for exhausting steam 26b used for heating a substrate W pulled up from the inside of pure water 18 in a washing tank 12 in a substrate heating section 14 from the substrate heating section is communicated and connected with the heat receiving side condensing section 62 of the heat exchange type feedwater heater.