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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH06275602(A)
申请公布日期
1994.09.30
申请号
JP19930061656
申请日期
1993.03.22
申请人
NEC KANSAI LTD
发明人
ITO YOSHIHIKO
分类号
H01L21/285;H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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