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发明名称
摘要
申请公布号
JPH0676938(B2)
申请公布日期
1994.09.28
申请号
JP19860295235
申请日期
1986.12.11
申请人
发明人
分类号
H01L29/84;G01L9/00;G01L9/04;(IPC1-7):G01L9/04
主分类号
H01L29/84
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代理人
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