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发明名称
FORMING METHOD OF METALLIC WIRING
摘要
申请公布号
JPH06267961(A)
申请公布日期
1994.09.22
申请号
JP19930052812
申请日期
1993.03.15
申请人
FUJITSU LTD
发明人
YOKOGAWA SHIGERU
分类号
G11B27/10;H01L21/28;H01L21/3205;H01L23/52;(IPC1-7):H01L21/320
主分类号
G11B27/10
代理机构
代理人
主权项
地址
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