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经营范围
发明名称
Multiple detector system for specimen inspection using high energy backscatter electrons.
摘要
申请公布号
EP0443410(B1)
申请公布日期
1994.09.21
申请号
EP19910101923
申请日期
1991.02.12
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
HILDENBRAND, WALTER WILLIAM;UTTERBACK, STEVEN GREGG
分类号
H01J37/244;H01J37/28;H01L21/66;(IPC1-7):H01J37/244
主分类号
H01J37/244
代理机构
代理人
主权项
地址
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