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发明名称
PLASMA PROCESSOR
摘要
申请公布号
JPH06260451(A)
申请公布日期
1994.09.16
申请号
JP19930071132
申请日期
1993.03.05
申请人
ANELVA CORP
发明人
MATSUURA KIYOSHI
分类号
C23C16/50;C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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