UP AND DOWN MOVING APPARTUS FOR WAFER CASSETTE

摘要

The wafer cassette upward and downward transfer apparatus for executing a minute upward and downward transfer of a cassette and being capable of operating within a vacuum state is disclosed: including a base so as to be capable of turning, a leading screw nut, an up-down plate, a chamber of a closed vacuum state, and numerous guide posts for piercing the up-down plate; having a construction for leading the wafer of the cassette inside gradually and for accommodating an outside wafer into the cassette inside gradually; and preventing wafer's pollution from alien substances.