MICROMECHANICAL RELAY WITH HYBRID ACTUATOR

摘要

A micromechanical relay has a tongue-shaped armature (53) etched out of an armature substrate (52). The armature (53) is elastically linked to the armature substrate and forms an electrostatic actuator together with the base electrode (58) of an underlying base substrate (51). In addition, a piezoelectric layer (60) which acts as a flexural transducer and forms an additional actuator is provided on the armature (53). When a potential is applied on the electrodes of the armature (53), the base substrate (51) and the piezoelectric layer (60), the armature is drawn towards the base substrate and lies then flat on the base, closing at least one contact (55, 56). The characteristics of both an electrostatic actuator on the one hand and a piezoelectric actuator on the other hand are thus obtained, so that a strong attraction force is generated when the armature begins to move and a strong contact force is generated after the armature is drawn.