Halbleiterdruckwandler.

摘要

In an improved semiconductor pressure sensor adapted to detect a pressure of a measured medium such as a refrigerant used in a refrigerating cycle for an automobile, there are provided a sensing portion composed of a glass support plate and a silicon substrate disposed thereon and provided with a diaphragm portion displaceable in accordance to a pressure of the measured medium at such a position of. the silicon substrate as to be brought into contact with the measured medium, a detecting means disposed within the sensing portion so as to detect a displacement of the diaphragm portion, a housing having an interior space including an accommodation portion for accommodating the sensing portion and having at least a predetermined portion of the accommodation portion made up of metal as opposed to the sensing portion, and a solder glass provided between the predetermined portion of the housing and a predetermined portion of the sensing portion so as to hermetically seal the interior space of the housing with respect to said measured medium. In another aspect of the invention, the housing holds the sensing portion in such a projecting manner as to enable the diaphragm portion to be put into the flow of the measured medium.