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经营范围
发明名称
ETCHING METHOD
摘要
申请公布号
JPH06224383(A)
申请公布日期
1994.08.12
申请号
JP19930011908
申请日期
1993.01.27
申请人
OKI ELECTRIC IND CO LTD
发明人
NITSUTA YOSHIMOTO;INOGUCHI KAZUYUKI
分类号
H01L21/265;H01L21/306;H01L21/308;H01L27/095;(IPC1-7):H01L27/095
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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