摘要 |
PURPOSE:To easily couple the light emitting element and light receiving element formed on a substrate having a level difference and to decrease leakage of light to this substrate by forming a flattening layer to flatten the level difference formed by the light emitting element, the light receiving element and an electronic circuit and disposing a optical waveguide structure on this flattening layer. CONSTITUTION:The electronic circuit 2, the light emitting element 3 and the light receiving element 4 are mounted on the substrate 1. The level difference is generated between the electronic circuit and the light emitting element 3 and the light receiving element 4 and, therefore, the flattening layer 5 is formed to produce the optical waveguide 6 for the purpose of efficient coupling of the light emitting element 3 and the light receiving element 4; thereafter, the optical waveguide 6 is formed on the flattening layer 5. An ordinary patterning technique is usable for producing the optical waveguide 6 atop the flattening layer 5 in such a manner and the easy registration of the optical waveguide 6 and the light elements 3, 4 is possible. A material absorbing the light from the light emitting element 3 is used as the flattening layer 5, by which the influence of the leaking light from the optical waveguide 6 to the electronic circuit 2 is lessened. |