发明名称 |
Capacitive surface micromachined differential pressure sensor |
摘要 |
A surface layer and a sacrificial layer are deposited on a substrate. A conductive structural layer bridges over the sacrificial layer and is anchored to the surface layer for creating paired conductive areas. A backside opening is etched in the substrate for defining a flexible diaphragm layer of reduced thickness. The sacrificial layer is removed so that pressures exerted on the backside opening will cause a change in capacitance between the paired conductive areas. Temporary posts support the conductive structural layer as the sacrificial layer is removed.
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申请公布号 |
US5332469(A) |
申请公布日期 |
1994.07.26 |
申请号 |
US19930014025 |
申请日期 |
1993.02.05 |
申请人 |
FORD MOTOR COMPANY |
发明人 |
MASTRANGELO, CARLOS H. |
分类号 |
G01L9/12;B23P15/00;B81B3/00;B81C1/00;G01L9/00;G01L13/06;G01P15/08;H01L21/306;H01L21/68;H01L29/84;(IPC1-7):H01L21/306;B44C1/22;C03C15/00;C23F1/00 |
主分类号 |
G01L9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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