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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06209081(A)
申请公布日期
1994.07.26
申请号
JP19930003085
申请日期
1993.01.12
申请人
TOSHIBA CORP
发明人
TSUCHIAKI MASAKATSU
分类号
H01L21/265;H01L21/266;H01L21/302;H01L21/3065;H01L21/8238;H01L27/092;(IPC1-7):H01L27/092
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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