| 摘要 |
PURPOSE:To exactly monitor the output of plural laser beam over a wide range with simple constitution by splitting plural laser beams made to be parallel and monitoring the monitoring beams by means of plural light receiving means, respectively. CONSTITUTION:Plural laser beams transmitted from a multibeam laser beam source 2 form plural parallel laser beams through a collimator lens means 3. These beams are splitted by a beam splitting means 6, monitoring beams are separated and converged in accordance with the plural laser beams by means of a condenser lens 13, made incident on plural light receiving means 14 and the outputs are monitored, respectively. Consequently, the output the plural laser beams from the multibeam laser beam source are exactly monitored over a wide range with the simple constitution, respectively. |
