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发明名称
REACTIVE SPUTTERING TARGET
摘要
申请公布号
JPH06200374(A)
申请公布日期
1994.07.19
申请号
JP19930000033
申请日期
1993.01.04
申请人
HITACHI METALS LTD
发明人
HIRAKI AKITOSHI;KUBOTA KUNICHIKA
分类号
C23C14/06;C23C14/34;(IPC1-7):C23C14/34
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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