| 摘要 |
PURPOSE:To allow easy measurement of the properties(coefficient of viscosity, conductivity, and permittivity) of liquid while filling a container with the liquid. CONSTITUTION:The first to third regions are formed in parallel on a piezoelectric substrate and pectinate input electrodes 52-54 and output electrodes 55-57 are formed while opposing each other through a predetermined distance at the both end parts of each region. A dielectric film is formed entirely on the surfaces of the first and second regions followed by formation of a conductive film entirely on the surface of the dielectric film. A dielectric film is further formed on the surface of the third region except a predetermined region between the input electrode 54 and the output electrode 57 and a conductive film is formed on the surface of the dielectric film. The first region is covered with a liquidtight cap 60. An elastic surface-wave unit 50 thus constituted is placed in a container 40 filled with a liquid A and the properties thereof are measured by measuring the difference of propagation of elastic surface-wave being propagated from the input electrodes 52-54 to the output electrodes 55-57 by means of a vector voltmeter 72. |
