| 摘要 |
PURPOSE:To provide an acceleration sensor in which multi-axial measurement is realized with no interference and the structure of device is simplified by optimizing the electrode structure. CONSTITUTION:The semiconductor mechanical amount sensor comprises a supporting part and an intermediate movable part 13 located thereabout while having a peripheral moving part 12. The movable parts 12, 13 are secured each other by means of a torsion bar 11. The movable parts 12, 13 are supported in a supporting region 14 on a substrate 10 and a control electrode 15 is disposed around the movable parts 12, 13. |
