| 摘要 |
<p>PURPOSE:To improve resolution and heat resistance by incorporating an alkali- soluble novolac resin, at least one alkali-soluble vinyl polymer, solvent, and dye. CONSTITUTION:This resist compsn. contains an alkali-soluble novolac resin, at least one alkali-soluble vinyl polymer, solvent, and dye. The alkali-soluble novolac resin is obtd., for example, by the condensation of phenols and aldehydes in the presence of acid catalyst. As for the alkali-soluble vinyl polymer, vinyl phenol copolymer, polyvinyl phenol resin with addition of hydrogen, or polyvinyl phenol is used. The mixing ratio of the alkali-soluble novolac resin and the alkali-soluble vinyl polymer is determined according to sensitivity, resolution or transparency required as the resist. For example, when high resolution is required, 100 pts.wt. of novolac resin. and about 10-300 pts.wt. of vinyl polymer are mixed.</p> |
