| 摘要 |
PURPOSE:To form a film of good quality without causing cracks and enable the formation of a film excellent in corrosion and oxidation resistance by coating the surface of a sintered compact consisting essentially of silicon carbide and silicon nitride with a complex film of the silicon carbide with silicon nitride. CONSTITUTION:This complex ceramic member has a complex film composed of silicon carbide and silicon nitride formed on a substrate composed of a complex sintered compact containing silicon carbide and silicon nitride at (1:9) to (9:1) ratio. The difference between the ratio represented by [silicon carbide/(silicon nitride + silicon carbide)] and the ratio of the complex film is within 0.3 expressed in terms of an absolute value. Thereby, a film of good quality without causing cracks in forming the film or polishing can be formed and the high-purity film can be formed while maintaining excellent mechanical characteristics of the substrate. |
