发明名称 POLISHING METHOD AND PSEUDO-SPECIMEN FOR POLISHING
摘要 PURPOSE:To establish a lapping method with excellent productivity which is free from micro-cracking, crystalline cracking, or intra-grain cracking in a work processed caused by abrasive grains even though the lapping process proceeds to cause the work to become thin. CONSTITUTION:A work to be processed 2 and a pseudo-specimen 3 in the form of a truncated cone so that the surface to be processed widens in the course of lapping-in are adhered fast to an affixation table 1, set on a lapping surface- plate 4, and subjected to simultaneous lapping while abrasives are supplied, wherein the speed of lapping is increased in the initial period by enlarging the pressure applied to the surface processed. The area of the surface processed is widened in compliance with the amount of lapping of the pseudo-specimen 3 in the course of lapping, and the contacting area with the surface-plate 4 is enlarged gradually, and thereby the pressure per unit area applied to the work processed 2 is decreased gradually, and the lapping is performed with the sunk speed.
申请公布号 JPH06190715(A) 申请公布日期 1994.07.12
申请号 JP19920359727 申请日期 1992.12.28
申请人 TOKIN CORP 发明人 TANABE TAKANOBU;TOGANO YUICHI
分类号 B24B37/005 主分类号 B24B37/005
代理机构 代理人
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