发明名称 |
Method and apparatus for generating high resolution optical images |
摘要 |
A microscope interferometer is described, that scans an object surface through a membrane mask with a multitude of pinholes. Light reflected back through the pinholes interferes with the darkfield image of the mask surface. The mask to object separation can be stabilized by an air flow through the pinholes. Image processing techniques allow to overcome the Abbe diffraction limit for the lateral resolution. |
申请公布号 |
US5327223(A) |
申请公布日期 |
1994.07.05 |
申请号 |
US19920901334 |
申请日期 |
1992.06.19 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
KORTH, HANS-ERDMANN |
分类号 |
G01Q60/18;(IPC1-7):G01B9/02 |
主分类号 |
G01Q60/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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