Microminiaturized electrostatic pump and method of production thereof.

摘要

A description is given of a microminiaturised electrostatic pump which has an improved pumping rate, is produced more precisely while at the same time reducing the electrode distance and is distinguished by less outlay in terms of assembly. The electrodes (2) consist of at least two rows (3-8) of rods, arranged one behind the other in the flow direction and loaded with different potential, which rods are aligned perpendicular to the flow direction and are jointly fitted to a wall part which has electrical conductor tracks. According to another embodiment, the electrodes (2a-h) form an integral part of a plane pump wall and are constructed as rib-shaped projections (2a-h) which project into the pumping space (41) and extend perpendicular to the flow direction. The microstructure of the pump is produced in terms of design and mutual arrangement of the electrodes using deep X-ray lithography.