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发明名称
摘要
申请公布号
JPH0648168(B2)
申请公布日期
1994.06.22
申请号
JP19890176920
申请日期
1989.07.07
申请人
发明人
分类号
G01B7/34;G01B21/30;G01N37/00;G01Q10/02;G01Q60/10;H01J37/28;(IPC1-7):G01B7/34
主分类号
G01B7/34
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代理人
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地址
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