发明名称 |
PRODUCTION OF SILICON NITRIDE POWDER |
摘要 |
PURPOSE:To provide a method for producing high-purity beta-Si3N4 powder with hardly any contamination of an impurity. CONSTITUTION:A raw material composed of alpha-Si3N4 powder is heated at >=1800 deg.C temperature in an inert gas under >=100atom gas pressure to produce the objective beta-Si3N4 powder. |
申请公布号 |
JPH06172036(A) |
申请公布日期 |
1994.06.21 |
申请号 |
JP19920350958 |
申请日期 |
1992.12.04 |
申请人 |
TOYOTA CENTRAL RES & DEV LAB INC |
发明人 |
UKIYOU YOSHIO;WADA SHIGETAKA |
分类号 |
C01B21/068;C04B35/58;C04B35/626 |
主分类号 |
C01B21/068 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|