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发明名称
ANNEALING DEVICE
摘要
申请公布号
JPH06168950(A)
申请公布日期
1994.06.14
申请号
JP19920320586
申请日期
1992.11.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
MATSUURA MEGUMI;ARIMA JUNICHI
分类号
H01L21/324;(IPC1-7):H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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