| 摘要 |
A method and system are described for performing phase unwrapping integrations in a phase-shifting interferometric profiling operation. The disclosed technique uses one characteristic of modulation or slope distributions to segment the modulation or slope histogram into a plurality of sections. The principal phase values are divided into a plurality of groups in accordance with corresponding modulation or slope histogram sections. The phase unwrapping integrations are performed in such an order that the areas with a high probability of containing a 2 pi discontinuity are contained in the last group integrated. Thus, inaccuracies due to 2 pi discontinuities do not "propagate" to earlier-computed phase values computed by the phase unwrapping algorithm.
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