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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06163528(A)
申请公布日期
1994.06.10
申请号
JP19920335604
申请日期
1992.11.20
申请人
NIPPON STEEL CORP
发明人
AMANO SHIGEKI
分类号
H01L21/316;(IPC1-7):H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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