HIGH FREQUENCY PLASMA GENERATING DEVICE,申请号JP19920310637-传众专利搜索

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发明名称	HIGH FREQUENCY PLASMA GENERATING DEVICE
摘要
申请公布号	JPH06163188(A)	申请公布日期	1994.06.10
申请号	JP19920310637	申请日期	1992.11.19
申请人	TOSHIBA CORP;TOSHIBA F EE SYST ENG KK	发明人	YASUOKA KOICHI;SATO TAKESHI;ISHII AKIRA;TAMAGAWA TORU;OKITA YUJI
分类号	B01J19/08;C23C16/50;H05H1/46;(IPC1-7):H05H1/46	主分类号	B01J19/08
代理机构		代理人
主权项
地址

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