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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06163843(A)
申请公布日期
1994.06.10
申请号
JP19920308496
申请日期
1992.11.18
申请人
HITACHI LTD
发明人
HASEGAWA MASATOSHI
分类号
H01L21/76;H01L21/8238;H01L27/08;H01L27/092;(IPC1-7):H01L27/092
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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