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经营范围
发明名称
VAPOR DEPOSITION DEVICE USING CONVERGENT ION BEAM
摘要
申请公布号
JPH06158292(A)
申请公布日期
1994.06.07
申请号
JP19920319921
申请日期
1992.11.30
申请人
SHIMADZU CORP
发明人
NAGAMACHI SHINJI
分类号
C23C14/32;C23C14/54;C23C16/48;H01J37/317;H01L21/203;H01L21/265;(IPC1-7):C23C14/32
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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